• Non-contact displacement sensor with accuracy up to nanometer level
  • Stable measurement of metal/ceramic/mirror/glass and other materials
  • Large measuring Angle, suitable for all kinds of working morphologies (deep hole, bevel, camber, etc.)
  • Fast detection speed
  • Suitable for high temperature and high pressure operation environment
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APPLICATIONS

Step Height Measurement
Step Height Measurement
Thickness Measurement
Thickness Measurement
Wafer Surface Testing
Wafer Surface Testing
Flatness Measurement
Flatness Measurement
Center Pointing
Center Pointing
Curved Display Profile Scanning
Curved-Display Profile Scanning

Product Size

HPS CFL052 size

Specifications

ModelHPS-CFL052Reference distance①51.24mm
Measuring range±8.29mm Linearity error2μm
Static repeatability②0.3μmMeasuring angle±15.4°
Spot diameter (Large)38μmSpot diameter (Small)8μm
IP protectionIP52 (Standard Level),IP65 (Bookable)Environment temperature-40~+85℃
MaterialAluminum 6061Optical fiber length3m(Standard); 5m/10m(Optional)
Weight710gOuter diameter52mm

*① This is the value from the lens structure surface to the center point of the lens measurement range.

*② This value is a 3σ value, which is obtained by measuring the tungsten steel standard gauge block on the optical platform in our company’s dust-free laboratory. The number of samples: 200000; integration time: 400us; light signal intensity (manually adjusted): 50%; moving average filter window size: 128.

*All technical specifications shall be subject to the latest official product datasheet.

*Hypersen Technologies reserves the right of final interpretation.

HPS CFL007 dettagli
HPS CFL052 img divisoria
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Do you Need more information?

Download Brochure Chromatic Confocal Sensor Hypersen

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Download HPS-CF Series Product_User_Selection Manual

Download HPS-CF Series 3D drawing_System Diagram

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