• 3D Line Confocal Sensor

    3D Line Confocal Sensors use chromatic confocal technology to provide high-precision, non-contact 3D measurements. They are capable of scanning entire lines at once, making them suitable for inspecting complex surfaces such as transparent, reflective, or curved materials.

    These sensors are widely applied in fields like electronics, semiconductor manufacturing, and quality control, offering detailed surface profiles and reliable measurements across diverse material types.

Products

  • Field of View: 2.3 mm

  • Measurement Range (Z): 1.4 mm

  • Working Distance: 9.3 mm

  • Z-axis Repeatability: 0.1 μm

  • X-direction Resolution: 1.1 μm

  • Mirror Angle Compatibility: ±45°

  • Field of View: 5.44 mm

  • Measurement Range (Z): 2.3 mm

  • Working Distance: 27.12 mm

  • Z-axis Repeatability: 0.47 μm

  • X-direction Resolution: 2.66 μm

  • Mirror Angle Compatibility: ±25°

  • Field of View: 10 mm

  • Measurement Range (Z): 6 mm

  • Working Distance: 22 mm

  • Z-axis Repeatability: 0.4 μm

  • X-direction Resolution: 4.9 μm

  • Mirror Angle Compatibility: ±22°

  • Line length 5.9mm
  • Measurement range 3 mm
  • Z-axis repeatability 0.1μm
  • X-direction resolution 2.9μm
  • Mirror angle compatibility ±20.5°
  • Line length 5.9mm
  • Measurement range 2.4mm
  • Z-axis repeatability 0.2μm
  • X-direction resolution 2.9μm
  • Mirror angle compatibility ±15°
  • Line length: 13mm
  • Measurement range: 6mm
  • Z-axis repeatability: 0.15μm
  • X-direction resolution: 6.3μm
  • Mirror angle compatibility ±13.5°
  • Line length 4.3mm
  • Measurement range 0.7 mm
  • Z-axis repeatability 0.04μm
  • X-direction resolution 2.1μm
  • Mirror angle compatibility ±15.1°
  • Line length 18.5mm
  • Measurement range 6 mm
  • Z-axis repeatability 0.25 μm
  • X-direction resolution 9 μm
  • Mirror angle compatibility ±13°
  • Power supply 19V≥5A
  • Power MAX.80W
  • Optocoupler isolation

 

 

ModelLine Length (mm)X-direction Resolution (μm)Z-direction Repeatability (μm)Measurement Range (mm)Scan Rate at Full Range (Hz)
HPS-LCF10005.92.90.135,000
HPS-LCF20005.92.90.22.45,000
HPS-LCF3000136.30.1565,000
HPS-LCF40004.32.10.040.75,000
HPS-LCF500018.59.00.2565,800
HPS-LCX10002.31.10.11.46,500
HPS-LCX20005.442.660.472.35,000
HPS-LCX3000104.90.465,000

What Is a 3D Line Confocal Sensor?

A 3D line confocal sensor is a high-precision, non-contact optical measurement device that leverages chromatic confocal technology to perform ultra-fast, high-resolution surface scans.

Unlike traditional point-based systems, this sensor captures an entire line of data in one pass, making it ideal for inspecting curved, transparent, or reflective surfaces.

Thanks to chromatic aberration—where different wavelengths of white light are focused at different depths—the sensor can accurately detect distance based on the wavelength of reflected light. This enables precise distance measurement that’s independent of surface reflectivity, delivering stable results even with black rubber, transparent films, or liquids.

Key Applications of Line Confocal Sensors

Our line confocal sensors are widely used across industries that demand high-speed and high-precision optical inspection and measurement.

Typical Applications:

  • Glass inspection & surface defect detection
    → Detect cracks, particles, and surface waviness in transparent materials

  • 3D profile measurement for electronics & semiconductors
    → Capture detailed topography of wafers, PCBs, and micro-components

  • Inline inspection of reflective & transparent materials
    → Stable, repeatable measurement even on complex optical surfaces

  • Thickness and flatness analysis in automotive and metal parts
    → Verify coating thickness, flatness, and layer uniformity

  • Gap and step height measurement in precision assembly
    → Accurate measurement of flushness and alignment in assembled products

These chromatic confocal displacement sensors are perfectly suited for integration into inline production lines, quality inspection systems, and R&D environments.

3D line confocal sensor scanning the curved surface of a smartphone for high-precision profile measurement

Curved Surface Profile Scanning

3D line confocal sensor detecting step height and gap between micro-assembled parts using optical measurement

Gap and Step Height Detection

3D line confocal sensor detecting foreign particles, air gaps, and bubbles in transparent and multilayered materials

Foreign Particle, Air Gap, and Bubble Detection

Wafer surface scanned by 3D line confocal sensor for high-precision surface flatness measurement in semiconductor production

Surface Flatness Measurement

3D line confocal sensor inspecting surface topography and dimensions of precision components in an inline quality control setup

Surface Topography and Dimension Inspection

PCB board with chips and electronic components analyzed using 3D line confocal sensor for step height and level difference detection

Step Difference and Height Analysis

Industry Use Cases of 3D Line Confocal Sensors

🔹Semiconductors & Microelectronics

These sensors are ideal for inline and offline inspection of semiconductor wafers, ICs, and other micro-components.

TSV (Through-silicon via) Defect Detection

3D topography image showing TSV defect detection using a line confocal sensor
tsv ok 3d topography line confocal

Defect-Free TSV

tsv insufficient 3d topography line confocal

TSV Insufficient Fill

tsv overflow defect 3d line confocal

TSV Overflow Defect

tsv missing defect 3d line confocal

Missing TSV

Wafer solder joint analysis

wafer solder joint 3d overview line confocal
wafer solder joint 3d closeup line confocal

IC wire bonding inspection

ic wire bonding inspection overview
ic wire bonding detailed view

Plasma etching defect analysis

plasma etching defect closeup 3d line confocal sensor
plasma etching defect overview 3d line confocal sensor

Printed circuit board (PCB) defect detection

pcb defect overview topography scan
pcb defect detailed topography view

Engraved character inspection on metal components

engraved character inspection detailed metal surface
engraved character inspection overview metal surface

Gluing Defect Detection on Printed Circuit Boards (PCBs)

pcb gluing defect detection overview
pcb gluing defect 3d topography scan

Complete inspection of IC components in one scan

one scan inspection detailed resistor capacitor inductor transistor

🔹Precision Assembly & Mechatronics

Critical for maintaining precision in assemblies involving small gaps, step heights, and flushness.

Mobile Phone Mid-Frame Step Height Measurement

exploded smartphone midframe step height vertical layers
3d topography smartphone frame step height detail
3d topography smartphone midframe step profile 1
3d topography smartphone midframe step profile 2

Edge Combination and Adhesive Seam Detection in Component Assembly

edge alignment adhesive joint frontal view
edge combination glued seam side view
edge combination glued seam angled view

🔹Optical & Transparent Material Inspection

For glass, films, lenses, curved surfaces, and multi-layer inspection — key for optics, glass processing, and medical devices.

Multilayer Glass Inspection

3d line confocal sensor multilayer glass inspection angle 1
3d line confocal sensor multilayer glass inspection angle 2

Screen Defect Detection

smartphone screen defect detection front view
3d topography smartphone screen defect analysis

Curved Screen Surface Inspection

curved smartphone screen side view inspection
3d topography curved screen inspection

🔹Battery Module & Thin Film Inspection

For R&D and QC in battery production lines, or component makers supporting e-mobility.

Metal Film Scratch Detection

metal film scratch overview
metal film scratch detail

Electrode Edge Burr Detection

electrode edge burr 3d topography battery inspection
electrode edge burr overview battery quality control

Electrode Sheet Bubble Detection

electrode sheet bubble detection lithium battery

Measurement Principle

3D Line Confocal Sensors operate by utilizing specially designed optics to extend the chromatic focal dispersion of different light wavelengths. This technique creates a magnified chromatic aberration, where each color focuses at a different distance from the lens.

When measuring, the distance between the target and the sensor determines which specific wavelength is sharply focused on the surface. By detecting the wavelength of the reflected light, the sensor precisely calculates the object’s distance — independently of the intensity of the reflected light.

Because the measured distance is unaffected by reflection intensity, the sensor delivers consistently accurate results even on materials with challenging optical properties, such as highly absorbent black rubber, transparent glass, or liquid surfaces. This makes it ideal for demanding industrial and scientific applications where material diversity and surface characteristics vary significantly.

Triangulation

Triangulation-based 3D optical sensor principle showing distance measurement using angular light projection and reflection

Coaxial measurement

Coaxial optical measurement principle of 3D Line Confocal Sensor showing shared light path for incident and reflected beams
3d confocal principle 681c9306ece80
3d co axial principle 681c930935bfc

Looking for point-based measurements instead? Explore our Chromatic Confocal Sensor solutions for ultra-precise displacement analysis.

Advantages of 3D Line Confocal Sensor

Excellent Adaptability to Various Materials

High-precision measurement is possible across almost all material types, including highly reflective surfaces such as glass, metals, and mirrors, ensuring reliable performance in diverse industrial environments.

3D Line Confocal Sensor demonstrating excellent adaptability across diverse materials including glass, metals, and mirrors for high-precision industrial measurement

±45° Wide Measuring Angle with Coaxial Design

Thanks to its coaxial optical structure, the incident and reflected light share the same optical path — eliminating angle deviation. This design ensures highly accurate and real-time measurements, even on surfaces with steep inclines or complex geometries.

  • ±45° large measurable angle

  • No angle-induced distortion

  • Ideal for tilted, curved, or irregular surfaces

  • Maintains accuracy across varied shapes and materials

3D Line Confocal Sensor with ±45° wide measuring angle featuring coaxial optical design for accurate measurements on tilted and irregular surfaces

Multilayered Materials Inspection

3D Line Confocal Sensor performing multilayered transparent material inspection with precise 2D and 3D data capture for defect detection on curved surfaces and edges

Thanks to its unique line chromatic confocal scanning technology, the 3D Line Confocal Sensor can construct precise 2D and 3D data of multiple transparent layers with a single scan. It ensures excellent performance across surfaces and curved edges (up to ±20.5°), enabling accurate inline defect detection, including chips and cracks, regardless of the glass thickness.

3D Glass and Side Seam Gluing Inspection

The sensor delivers outstanding inspection capabilities, detecting defects such as scratches, surface unevenness, and contour mismatches, even at high speeds on assembly lines.

3D Line Confocal Sensor inspecting glass surfaces and side seam gluing for scratches, unevenness, and contour defects at high-speed assembly lines

One-Step Line Confocal Scanning

3D Line Confocal Sensor performing one-step line confocal scanning capturing 3D point clouds, 2D contour, depth, and grayscale images in high resolution

By applying a unique line confocal scanning method, the sensor captures various high-resolution data types in a single scan, including:

  • 3D point clouds

  • 2D contour images

  • High-definition depth images

  • High-definition grayscale images

This detailed raw data supports integration into complex measurement and inspection systems.

Detailed Surface Inspection

With 2,048 scanning points per line and a minimum point interval of just 2.9 μm, the sensor reveals surface topography in exceptional detail. Tiny defects such as concavities or convexities can be detected with a Z-axis repeatability of up to 0.1 μm for highly accurate measurement results.

3D Line Confocal Sensor performing detailed surface inspection with 2048 scanning points and 2.9 μm resolution to detect minute surface defects

Ultrahigh-Speed Scanning

3D Line Confocal Sensor performing ultrahigh-speed scanning up to 35,000 lines per second for fast, precise industrial measurements including surface roughness, topography, and defect inspection

The sensor achieves speeds up to 35,000 lines per second, making it ideal for high-volume, high-precision factory applications. It supports multidirectional 3D imaging analysis for various needs, such as:

  • Dimension and surface roughness measurement

  • Topography and flatness analysis

  • Defect and thickness inspection

  • Tomography and step height measurement

  • Gap and flush evaluation

3D Topography & 2D Contour Detection

Equipped with an advanced AI-based image recognition algorithm. It not only detects and analyzes 2D contour features but also captures precise 3D height and depth measurements, making it ideal for high-precision surface inspection tasks.

Geometry & Dimensions

  • Size & Shape

  • Morphology

  • Flatness

  • Thickness

  • Break Height

  • Volume

  • Scope

Surface Analysis

  • Surface Roughness

  • Clearances & Step Differences

  • Surface Flatness Variations

Defect Detection

    • Cracks & Faults

    • Glitches & Flicker Issues

    • Structural Defects

3D Line Confocal Sensor analyzing 3D topography and 2D contours using AI-based image recognition for high-precision surface inspection

Complete SDK and Software Support

Software interface and SDK support for easy integration of 3D line confocal sensor into industrial and research environments

The system offers simple installation, user-friendly programming, and an intuitive software interface. It is backed by customizable service options, ensuring a seamless and worry-free integration into your production or research environment.

FAQS

What is the difference between line and point confocal sensors?

A point confocal sensor measures one point at a time, making it slower for scanning large areas. A line confocal sensor captures a full line in a single scan, significantly increasing measurement speed while maintaining high accuracy.

What materials can line confocal sensors measure?

Line confocal sensors work with a wide range of materials, including transparent glass, mirror-like metal surfaces, black rubber, and curved plastics. Their adaptability makes them ideal for complex industrial environments.

 

What industries use chromatic line confocal sensors?

These sensors are widely used in industries requiring high-precision inspection, including semiconductor manufacturing, electronics, medical device production, automotive parts, and advanced glass processing.

Why Use a 3D Line Confocal Sensor?

✔️ Accurate measurement on glass, metal, and plastics
✔️ Works even on curved or angled surfaces
✔️ Detects tiny defects during fast production
✔️ Captures 3D and 2D images in a single scan

Can these sensors measure on curved or uneven surfaces?

Yes. Thanks to their coaxial optical design and wide mirror angle compatibility (up to ±45°), they accurately measure angled, curved, and irregular surfaces without distortion.

 

What is the typical measurement resolution and repeatability of these sensors?

Depending on the model, resolutions range from about 1.1 μm to 9 μm in the X direction, with Z-axis repeatability as precise as 0.04 μm, suitable for micro-scale measurements and quality control.

 

Are 3D line confocal sensors suitable for transparent or multilayered materials?

Absolutely. They excel at inspecting transparent films and multilayer structures by using chromatic confocal scanning to detect defects, thickness variations, and surface irregularities even on complex layered surfaces.

 

How fast can 3D line confocal sensors scan surfaces?

They support ultra-high scanning speeds, with some models capable of capturing up to 35,000 lines per second, ideal for high-volume inline production without sacrificing precision.

 

What kind of data output can I expect from these sensors?

They provide rich datasets including 3D point clouds, 2D contour images, high-definition depth maps, and grayscale surface textures, enabling comprehensive surface characterization.

Is it possible to integrate these sensors into existing production or research setups?

Yes. These sensors come with user-friendly software interfaces, complete SDKs, and customizable options to facilitate smooth integration into various industrial automation and R&D environments.

 

Can the sensors detect minute surface defects like scratches, gaps, or particles?

Yes, their high resolution and repeatability enable detection of subtle surface defects such as micro-cracks, particles, step heights, and flatness variations, ensuring rigorous quality assurance.

 

Do these sensors require special environmental conditions or maintenance?

Generally, they operate reliably under standard industrial conditions but may require periodic calibration and protection from dust or extreme environmental factors to maintain optimal performance.

Interested in a custom solution? Contact us or request a quote today.